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Semiconductor
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With more than 35 years of experience, PVA TePla America is a leader in the design and manufacture of Gas Plasma Systems.
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08/25/08
Thin, Strong, Cheap - Improving 3D Chip quality by Remote Cold Dry Etching
BY PETER HEINZE, PH.D., MARTIN AMBERGER, AND THERESE CHABERT,
PVA TEPLA
Tradeshow attendence for BIOMEDevice 2008 Sept 10, 2008
Wafer Fab & Packaging Integration - Perfect Chips: Chip-Side-Wall Stress Relief Boost Stability
PVA TePla presents its newest plasma process equipment and latest equipment release Plasma System 80 PLUS.
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PVA TePla America Announces Representation in the United Kingdom, Ireland and India
Televised Video World Business Review with Alexander Haig.
PVA TePla’s Quality attributes: Information about our certifications and manufacturing according to ISO9001:2000, SEMI and European CE Standard
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Plasma Applications
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- Photoresist ashing
- MEMS: SU8 ashing
- Flat Panel Display: Cleaning & activation
- Solar Cell etching
- Ultra Thin Wafer: stress relief & passivation
- Chip Packaging: cleaning & activation
- Wafer Metrology: stress and implant dose monitoring
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Industrial · Medical
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Plasma Applications
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- Adhesion promotion for:
- Potting and encapsulation
- Bonding and assembly
- Optical disc mastering
- Medical device cleaning
- Activation of medical diagnostic
platforms
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